47 min
History of ALD ALD stories podcast
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- Technology
We meet Professor Riikka Puurunen of Aalto University in Finland, and discuss the history of ALD and other topics close to her heart.
You may also wish to check out the articles we mentioned on this episode:
A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy, Riikka Puurunen https://onlinelibrary.wiley.com/doi/full/10.1002/cvde.201402012
From V. B. Aleskovskii's “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition, Anatolii A. Malygin et al. https://doi.org/10.1002/cvde.201502013
We meet Professor Riikka Puurunen of Aalto University in Finland, and discuss the history of ALD and other topics close to her heart.
You may also wish to check out the articles we mentioned on this episode:
A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy, Riikka Puurunen https://onlinelibrary.wiley.com/doi/full/10.1002/cvde.201402012
From V. B. Aleskovskii's “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition, Anatolii A. Malygin et al. https://doi.org/10.1002/cvde.201502013
47 min